The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2003
Filed:
Feb. 07, 2001
Applicant:
Inventors:
Yoshihiko Toyoda, Hyogo, JP;
Kiyoshi Hayashi, Hyogo, JP;
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C25D 1/700 ;
U.S. Cl.
CPC ...
C25D 1/700 ;
Abstract
The electroplating apparatus includes a substrate disposed above an insoluble anode and a filter disposed between the insoluble anode and the substrate for removing oxygen generated at the insoluble anode. This plating apparatus using an insoluble anode allows easy placement and removal of the substrate and prevents poor deposition and poor filling caused by accumulation, on the substrate, of oxygen generated at the insoluble anode.