Ink jet recording head, method for manufacturing the same, and ink jet recorder

Abstract

Disclosed are an ink-jet recording head, in which the rigidity of the compartment wall is improved, pressure generating chambers can be arranged in a high density, and cross talk between the pressure generating chambers is reduced, and a manufacturing method of the same and an ink-jet recording apparatus. In an ink-jet recording head including a passage-forming substrate ( ) having a silicon layer consisting of single crystal silicon, in which a pressure generating chamber ( ) communicating with a nozzle orifice is defined; and a piezoelectric element ( ) for generating a pressure change in the pressure generating chamber, the piezoelectric element being provided on a region facing the pressure generating chamber ( ) via a vibration plate constituting a part of the pressure generating chamber ( ), the pressure generating chamber ( ) is formed so as to open to one surface of the passage-forming substrate ( ) and not to penetrate therethrough, at least a bottom surface of inner surfaces of the pressure generating chamber ( ), which is facing to the one surface, is constituted of an etching stop surface as a surface in which anisotropic etching stops, and the piezoelectric element ( ) is provided on the one surface side of the passage-forming substrate ( ) by a film formed by film deposition technology and a lithography method.