The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2002
Filed:
Dec. 07, 1999
Katsuyasu Mizuno, Aichi, JP;
Nidek Co., Ltd., Aichi, JP;
Abstract
An oblique incidence interferometer in which laser light from a laser light source is transmitted through a reference plane and is made incident upon a measurement surface from an oblique direction. The shape of the measurement surface is measured on the basis of interference fringes formed by reflected light reflected from the reference plane and reflected light reflected from the measurement surface. A deflecting element for deflecting the laser light emitted from the laser light source in order to decrease the coherence of the laser light is disposed in an optical path leading to the reference plane, the deflecting element being adapted to continuously change the direction of deflection.