Pod load interface equipment adapted for implementation in a fims system

Abstract

A box load interface implemented in a FIMS system includes a retractable port door that is attachable to the box door of a transport box. The port door selectively moves the box door toward or away from the box cover of the transport box to thereby open or close it. A slidable tray is mounted to a support shelf. The slidable tray includes a clamping mechanism that receives and clamps the transport box in a fixed position on the slidable tray. A positioning mechanism moves the slidable tray to force the box cover against the port plate. The positioning mechanism also retracts from the port plate to release the box cover. A port door translation mechanism is operatively connected to the port door to advance it and retract it toward and away from a port plate aperture. A port door elevator assembly operates in cooperation with the port door translation mechanism to move the port door after the box door has been moved away from the box cover and through the port plate aperture. An alternative embodiment implements the port door translation mechanism and elevator assembly as an integral structure. A differential optical scanning assembly detects positions of wafer specimens located in the transport box. A robot assembly is supported by a linear traveling assembly between adjacent port plate apertures for removing and inserting wafer specimens from the transport box. The linear traveling assembly includes a carriage that supports the robot assembly and that travels along a lead screw between the port plate apertures driven by a lead nut mechanism.