The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2002
Filed:
Oct. 17, 2001
Applicant:
Inventor:
Naokatsu Ikegami, Saitama, JP;
Assignee:
Oki Electric Industry Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/13205 ; H01L 2/14763 ;
U.S. Cl.
CPC ...
H01L 2/13205 ; H01L 2/14763 ;
Abstract
A method for manufacturing a field effect transistor includes a first step for etching 70%˜90% of the thickness of an insulating film (SiO or Si N ) formed covering a gate electrode formed on a silicon semiconductor substrate; and a second step for etching a remaining insulating film to remove an unnecessary portion, other than sidewall spacers, of the remaining insulating film. The two etching steps are respectively for the purpose of vertical processing of the sidewall spacers formed on each side of the gate electrode and securing a high etch selectivity ratio of the insulating film to the silicon substrate.