The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2002
Filed:
Aug. 03, 2000
Applicant:
Inventors:
Valli Arunachalam, Austin, TX (US);
Peter L. G. Ventzek, Austin, TX (US);
Dean J. Denning, Del Valle, TX (US);
John C. Arnold, Austin, TX (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/600 ; C23C 1/434 ; H01L 2/144 ;
U.S. Cl.
CPC ...
C23C 1/600 ; C23C 1/434 ; H01L 2/144 ;
Abstract
A method and an apparatus for forming a layer on a substrate are disclosed. In accordance with one embodiment, a substrate ( ) is placed into a chamber ( ) that includes a coil ( ) and a shield ( ) wherein the coil and the shield are electrically isolated by an isolation/support member ( ) having a first surface ( ) that is substantially contiguous with a surface of the coil and having a second surface ( ) that is substantially contiguous with a surface of the shield. A layer ( ) is then deposited onto the substrate ( ).