The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2002
Filed:
May. 09, 2001
Dong-Sik Kim, Suwon, KR;
Cheol-Su Park, Yongin, KR;
Samsung Electronics Co., Ltd., Suwon, KR;
Abstract
A wafer clamping tension measuring apparatus includes a base plate having a guide groove formed in an upper surface and a moving plate having a guide rail protruding from a lower surface and reciprocating with the guide groove. A tension gauge is fixed to an upper surface of the moving plate for measuring the tension of a wafer clamping elastic member confronting the tension gauge. A displacement restricting block is attached at one end of the base plate nearest to the wafer clamping elastic member to restrict the movement of the moving plate relative to the base plate when the moving plate is displaced towards the displacement restricting block.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile