The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2002
Filed:
Mar. 30, 2001
Applicant:
Inventors:
Edward A. Hill, Chapel Hill, NC (US);
Ramaswamy Mahadevan, Chapel Hill, NC (US);
Assignee:
JDS Uniphase Inc., , CA;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01G 5/01 ;
U.S. Cl.
CPC ...
H01G 5/01 ;
Abstract
MEMS devices include a substrate, an anchor attached to the substrate, and a multilayer member attached to the anchor and spaced apart from the substrate. The multilayer member can have a first portion that is remote from the anchor and that curls away from the substrate and a second portion that is adjacent the anchor that contacts the substrate. Related methods are also disclosed.