The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2002
Filed:
Mar. 15, 2000
Marc Spinali, San Ramon, CA (US);
Nikon Corporation, , JP;
Abstract
A optical assembly ( ) for directing and/or focusing a beam of light energy ( ) for an exposure apparatus ( ) is provided herein. The optical assembly ( ) includes one or more optical sections ( ) which are assembled together. At least one of the optical sections ( ) includes an optical housing ( ) having an inner wall ( ) which defines a optical chamber ( ). One or more optical elements (18) can be secured to the optical housing ( ) of each optical section ( ). Additionally, each optical section ( ) can include a plurality of outlet ports ( ) and a plurality of inlet ports ( ) for purging the optical chamber ( ). The inlet ports ( ) and the outlet ports ( ) are uniquely positioned to minimize the time required to purge the optical assembly ( ) and the amount of replacement fluid ( ) used to purge the optical assembly ( ).