The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2002
Filed:
Aug. 18, 2000
Applicant:
Inventor:
Kyo Ho Moon, Daeku, KR;
Assignee:
LG. Philips LCD Co., Ltd., Seoul, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02F 1/1343 ; G02F 1/13 ; C30B 3/300 ; C23F 1/00 ;
U.S. Cl.
CPC ...
G02F 1/1343 ; G02F 1/13 ; C30B 3/300 ; C23F 1/00 ;
Abstract
In a partially formed liquid crystal display device, a window definition layer defines an etching endpoint detection window over a dummy pattern formed on the substrate. The window definition layer also defines an etch window over a real pattern formed on the substrate. The real pattern and the dummy pattern have the same thickness. During an etching process, a reactant from the etching step is monitored to determine when to stop the etching process.