The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2002
Filed:
Mar. 29, 2001
Applicant:
Inventor:
Paul George Bennett, Bristol, GB;
Assignee:
Trikon Holdings Limited, Gwent, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 7/24 ;
U.S. Cl.
CPC ...
H01J 7/24 ;
Abstract
An inductive coil assembly for plasma processing apparatus includes a coil and an external screen. The coil is constituted by a plurality of coil portions each including an inductive segment. The assembly also includes respective connectors for connecting each portion in parallel with the others and to an RF source. The connectors are configured such that the current flowing in any part of the coil other than the segments is balanced by current flowing in an opposite sense in an adjacent part.
Bennett, Paul. (2002). Inductive coil assembly having multiple coil segments for plasma processing apparatus (U.S. Patent No. 6495963). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6495963
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile