The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2002
Filed:
Nov. 18, 1999
Applicant:
Inventors:
Akio Kawamura, Fukuyama, JP;
Takahiro Tsuchida, Fukuyama, JP;
Assignee:
Sharp Kabushiki Kaisha, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/7108 ; H01L 2/976 ;
U.S. Cl.
CPC ...
H01L 2/7108 ; H01L 2/976 ;
Abstract
A semiconductor device comprises a first insulating film which is formed on a semiconductor substrate and has a groove whose bottom does not reach said semiconductor substrate, and a capacitive element which is composed of a lower electrode of a first metal layer which is embedded in said groove, a capacitive insulating film of a second insulating film formed on said lower electrode, and an upper electrode of a second metal layer formed in a region where both said lower electrode and said capacitive insulating film are formed.