The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2002
Filed:
Dec. 27, 2000
Applicant:
Inventors:
Nariaki Hamamoto, Kyoto, JP;
Takao Matsumoto, Kyoto, JP;
Assignee:
Nissin Electric Co., Ltd., Kyoto, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21K 5/10 ;
U.S. Cl.
CPC ...
G21K 5/10 ;
Abstract
The ion-implanting apparatus includes an implanting control device having the functions of sweeping an ion beam by a sweeping magnet and scanning a target by a scan mechanism. The implanting control device has the functions of changing a sweep frequency of the ion beam to be swept by said sweeping magnet according to at least one of the species and energy of the ion beam and changing the minimum number of times of scanning of the target to be scanned by said scan mechanism according to the changing of the sweep frequency.