The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2002
Filed:
May. 31, 2001
John G. Maltabes, Austin, TX (US);
Alain B. Charles, Singapore, SG;
Karl E. Mautz, Round Rock, TX (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
The present invention generally relates to a method for controlling the temperature of a substantially flat object and to a temperature-controlled chuck comprising a chuck body ( ) having an object support side ( ) and a back side ( ). Said object support side ( ) holds a substantially flat object ( ) having a front side ( ) and a back side ( ) on said back side ( ) of said object ( ). A plurality of temperature sensing elements ( ) is distributed on said object support side ( ) to measure the temperature distribution of said flat object ( ). A plurality of individual temperature influencing elements ( ) is distributed on said object support side ( ) to face said back side ( ) of said flat object ( ), each of said temperature influencing elements ( ) being arranged to influence the temperature of a partial area of said object's back side ( ) as desired.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile