The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2002
Filed:
Jul. 05, 2000
Applicant:
Inventors:
Inna Shmurun, Foster City, CA (US);
Scott Hendrickson, Brentwood, CA (US);
Gwendolyn Jones, Roseville, CA (US);
Shankar Venkataraman, Santa Clara, CA (US);
Son T. Nguyen, San Jose, CA (US);
I-Chun Eugenia Liu, Sunnyvale, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 3/02 ; C23C 1/600 ;
U.S. Cl.
CPC ...
B32B 3/02 ; C23C 1/600 ;
Abstract
A lid assembly for a semiconductor processing apparatus having at least two chambers comprises a lid plate having a first side and a second side and a plasma generation source mounted to the first side of the lid plate. Additionally, at least two gas boxes are coupled to the first side of the lid of the lid plate, and a divider is coupled between the plasma generation source and the at least two gas boxes.