The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2002
Filed:
Jun. 16, 1997
Applicant:
Inventors:
Stefan Locher, Alzenau, DE;
Eckhard Wirth, Gelnhausen, DE;
Assignee:
Leybold Optics GmbH, Alzenau, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/430 ; C23C 1/456 ;
U.S. Cl.
CPC ...
C23C 1/430 ; C23C 1/456 ;
Abstract
Disclosed is an electron beam evaporator for installation in a vacuum apparatus which provides for variable positioning during or between applications of a coating. The apparatus has a carrier plate which is a flat hollow body, the top cover plate of which supports the evaporator. The hollow body is disposed over the bore in the tank such that it can be turned about the main axis of the bore. The component assemblies of the electron beam evaporator are vacuum-tight on the cover plate and the connecting lines are carried through the interior of the hollow body to the component assemblies.