The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2002
Filed:
Jun. 16, 2000
Isao Suzuki, Tokyo, JP;
MKS Japan, Inc., Tokyo, JP;
Abstract
The vaporizing apparatus comprises a disk portion in which a plurality of sheet disks are provided in a stacked configuration, with a top disk being provided on a top of the sheet disks. Each of the sheet disks has a thin sheetlike form and includes a through-hole at a central portion thereof. A shaft extends through these openings and supports the sheet disks and the top disk. The disk portion is accommodated in a chamber formed on a base. A liquid is introduced through a flow passage into the openings of the sheet disks of the disk portion in the chamber. Heaters are provided within the base. A piezoactuator is provided so as to bias the disk portion in the chamber from a side of the top disk. The piezoactuator adjusts the gaps between the disks and opening/closing of the flow passage.