Head member having ultrafine grooves and a method of manufacture thereof

Abstract

A printer head member having ultrafine grooves of high density and high precision. In one or more embodiments of the invention, a flat plate made of ceramics, glass, silicon or the like is bonded and integrated to a partition wall made of a powder of ceramics, glass, silicon or the like, obtained by a molding process. The mold used for obtaining the partition includes ultrafine grooves that conform to the shape of a partition. In another embodiment of the invention, a member for passage having high density and high precision is obtained by a molding process. A flat plate made of ceramics, glass, silicon or the like is bonded and integrated to a partition wall made of a powder of ceramics, glass, silicon or the like, using a molding die having one or more fine grooves for forming one or more partition walls, wherein at least a passage is formed between the partition walls. One or more embodiments of the invention are directed to an ink jet printer head including one or more ink chambers, an ejection port communicating with the ink chambers, and a diaphragm for applying pressure to the ink chambers. The diaphragm is formed of conductive inorganic material, and a piezoelectric element bonded to the diaphragm. A driving electrode is formed on the piezoelectric element. The displacement of a piezoelectric element is favorably transmitted to the diaphragm.