The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2002
Filed:
Feb. 02, 1999
Kenichi Kotoku, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A semiconductor manufacturing apparatus reduces limitation on operation position due to the layout of a factory, and enables an operator to check data in a working position upon maintenance of the apparatus, thus realizing efficient operation. A console having a display unit to display wafer information, recipe information, apparatus status and the like, and an input unit to input data and information, is removably fixed in any of a plurality of attachment positions provided on the semiconductor manufacturing apparatus main body, via a console attachment member. The height of the display unit and that of the input unit can be adjusted by height adjustment means having band members and fixing members.