The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2002
Filed:
Feb. 16, 2001
Motonobu Kourogi, Kanagawa, JP;
Motoichi Ohtsu, Tokyo, JP;
Ricoh Company, Ltd., Tokyo, JP;
Abstract
Measurement of an internal structure of a sample is performed using interference of light within a short time. Through a first optical frequency comb generator using a first signal having a frequency f and generating reference light having a sideband every interval of the frequency f and a second optical frequency comb generator using a second signal having a frequency f and generating object light having a sideband every interval of the frequency f , and sweeping of emission timing between the reference light and the object light, by changing a phase difference or frequency difference between the first signal and second signal, and detecting a change in light intensity of the interference light due to the interference, operation of detecting the interference position is made at a high speed.