The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2002
Filed:
May. 04, 2001
Applicant:
Inventors:
Jun Kanamori, Tokyo, JP;
Yoshiaki Katakura, Kanagawa, JP;
Assignee:
Oki Electric Industry Co, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/18242 ;
U.S. Cl.
CPC ...
H01L 2/18242 ;
Abstract
In fabricating a capacitor portion of a semiconductor device, after forming an upper electrode, a resist pattern for forming a lower electrode is formed and etching processing of an insulating film layer and a first metal layer is carried out. Thus, the lower electrode and a wiring pattern can simultaneously be formed by etching the insulating film layer and the first metal layer after forming a resist pattern one time, without a resist pattern directly formed on the first metal layer.