The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2002
Filed:
Nov. 03, 2000
Timothy Stanley, Austin, TX (US);
John Maltabes, Austin, TX (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
A wafer processing equipment comprises a track ( ) for transporting wafers, a wafer launch station ( ) for launching wafers into a section of said track ( ), a first wafer processing tool ( ) for performing a first process to wafers in said section of said track ( ), a buffer ( ) for storing wafers processed by said first wafer processing tool ( ), a second wafer processing tool ( ) for performing a second process to wafers processed by said first wafer processing tool ( ), and control means ( ) for controlling said wafer launch station ( ) such that every wafer launched by said launch station ( ) is processed by said second processing tool ( ) within a predetermined time window.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile