The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2002
Filed:
Jul. 24, 2000
Katsuhito Nishikawa, San Jose, CA (US);
Thomas F. Carlos, San Jose, CA (US);
Moore Epitaxial, Inc., Tracy, CA (US);
Abstract
A linear robot includes a slide and an end effector arm connected to the slide. The end effector arm includes an end effector. During use, vacuum is selectively supplied to the end effector, with selectively grabs and releases substrates. The slide is supported on a hanger. An air bearing between the slide and the hanger allows the slide and end effector arm including any substrates held by the end effector to freely move along the hanger. The entire periphery of an air bearing surface of the slide is lined by a collector, which is coupled to a vacuum source. Pressurized gas from the air bearing region between the slide and the hanger is captured by the collector. Thus, any particulates entrained with the pressurized gas are captured and do not contaminate the substrates.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile