The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2002
Filed:
Jul. 02, 1999
Applicant:
Inventors:
Erwin Naegele, Hessigheim, DE;
Martin Mast, Gerlingen, DE;
Werner Fischer, Blaichach, DE;
Rainer Foerstner, Burgberg, DE;
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 7/08 ;
U.S. Cl.
CPC ...
G01L 7/08 ;
Abstract
A method of producing a number of pressure sensors includes joining a plurality of support bodies to a metal component, the metal component forming a diaphragm, applying a thin-film coating to produce the sensor elements, and finally dividing the metal component provided with the thin-film coating and the support bodies into a plurality of pressure sensors, each having a single one of the support bodies so that the number of pressure sensors formed corresponds to the plurality of the support bodies.