The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2002
Filed:
Dec. 14, 2000
Uwe Breng, Gundelfingen, DE;
Martin Hafen, Rusteuhart, FR;
Eberhard Handrich, Kirchzarten, DE;
Bruno Ryrko, Denzlingen, DE;
LITEF GmbH, , DE;
Abstract
A micromechanical rotation rate sensor based on the Coriolis principle includes two plate-like oscillators arranged one above the other in two planes for excitation to oscillate by means of an electrostatic drive. Three elements in each case form an oscillator structure. The oscillators are in each case suspended on opposite side edges by at least one web between an associated plate-like support and an associated drive plate element. The two supports and the two drive plate elements are, in each case, arranged one above the other in layers. A fixed plate element is located between the two drive plate elements so that, in each case, an identical narrow drive gap is defined between the drive plate elements. The drive gap is considerably smaller than the distance between the plate-like oscillators. An intermediate support that fills the intermediate space is inserted between the two plate-like supports and is completely electrically isolated from the surrounding frame to further reduce the respective capacitances to be recharged. The invention reduces the electrodynamic coupling between the drive and the read-out by a factor of about 100 in comparison with known micromechanical rotation rate sensors of like design.