The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 03, 2002

Filed:

Jan. 21, 2000
Applicant:
Inventors:

Hideo Mitsuhashi, Toyko, JP;

Katsuhisa Okawa, Tokyo, JP;

Hiroshi Naka, Tokyo, JP;

Assignee:

NEC Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 1/900 ; G05B 1/302 ; H01L 2/100 ; H01L 2/1302 ;
U.S. Cl.
CPC ...
G06F 1/900 ; G05B 1/302 ; H01L 2/100 ; H01L 2/1302 ;
Abstract

A working process end point real time determination method by which a working process end point can be determined accurately without an error even if a working process measurement signal has such a great variation that; the variation cannot be removed fully from and still remains in resulting smoothed data is disclosed. In the method, a working process end point is estimated by extrapolation from the variation of the average gradient of the averaged data in a predetermined period of the working process measurement signal to perform determination of the end point. Where the working process does not allow such extrapolation, it is first determined that the working process is near the working process end point based on the absolute value of the average gradient of the averaged data, and then the working process end point is determined using a short time gradient calculated from a value at the present measurement point of time and another value in the nearest past of the averaged data of the working process measurement signal.


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