The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2002
Filed:
May. 24, 2001
Applicant:
Inventors:
Stephen Rolt, Herts, GB;
Gordon Henshall, Harlow, GB;
Assignee:
Nortel Networks Limited, St. Laurent, CA;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 6/26 ; G02B 6/42 ; G02B 6/35 ;
U.S. Cl.
CPC ...
G02B 6/26 ; G02B 6/42 ; G02B 6/35 ;
Abstract
Distortion compensation of an optical micro-electro-mechanical system (MEMS) device disposed on a substrate surface is effected by measuring degradation of an optical parameter of the device and applying a force to the substrate to reverse the degradation. The compensating force may be provided via a layer of piezo-electric material bonded to the opposite surface of the substrate and to which a control voltage is applied. The device distortion may arise from thermal mismatch effects in a package housing containing the device. Typically, the MEMS device comprises an optical crosspoint switch array.