The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2002
Filed:
Feb. 05, 2001
Pawel Drabarek, Tiefenbronn, DE;
Marc-Henri Duvoisin, Préverenges, CH;
Dominique Marchal, Vallorbe, CH;
Vincent Thominet, Echandens, CH;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
An interferometric measuring device for detecting the shape, roughness or distance of surfaces is described. The interferometric measuring device has a modulation interferometer in which two partial beams are formed, one of which is shifted in its light phase or light frequency with respect to the other by a modulation device. The surface is measured with a measuring probe which is connected to the modulation interferometer and in which a measuring beam and a reference beam are formed, and an interference pattern which is analyzed in a connected receiving unit is formed from the measuring beam and the reference beam. A compact design that is easy to handle even in a manufacturing process is achieved by spatially separating the modulation interferometer which is designed as a basic unit from the measuring probe and by the fact that it can be connected to the measuring probe by an optical fiber arrangement, and the measuring arm and the reference arm are formed by solids conducting the measuring beam and the reference beam.