The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2002
Filed:
Jun. 08, 2000
Akira Watanabe, Tokyo, JP;
Akihiko Nara, Tokyo, JP;
Oki Electric Industry Co, Ltd., Tokyo, JP;
Abstract
A method and a system are disclosed for aligning an object to be processed with a predetermined target article, with enhanced accuracy. The method includes the steps of detecting positional data with respect to the object in a state such that the object is rotated by +90 degrees with respect to a reference direction (step S ), and also detecting positional data with respect to the object in a state such that the object is rotated by −90 degrees with respect to the reference direction (step S ). A positional correction factor for the object's position can then be calculated by making use of the positional data attained by both of the above detection steps (step S ). Therefore, asymmetrical signal waveforms when the reflected alignment light is detected can be offset, so that the alignment accuracy can be enhanced.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile