The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 03, 2002

Filed:

Nov. 02, 2000
Applicant:
Inventors:

Timothy D. Stowe, Palo Alto, CA (US);

Daniel Rugar, Los Altos, CA (US);

Thomas W. Kenny, San Carlos, CA (US);

Assignee:

Other;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 2/912 ; G01R 2/300 ; G01R 3/100 ; G01R 1/918 ; G01R 2/726 ;
U.S. Cl.
CPC ...
G01R 2/912 ; G01R 2/300 ; G01R 3/100 ; G01R 1/918 ; G01R 2/726 ;
Abstract

An apparatus using a resonator probe for determining an electronic property of a conductor across a dielectric. The apparatus has a device for inducing lateral mechanical oscillations of the resonator probe and a voltage source for producing a voltage difference between the resonator probe and the conductor to create an electronic drag between the conductor and resonator probe, thus damping the mechanical oscillations of the probe. The electronic property, such as charge carrier mobility, surface resistance, charge carrier lifetime and the number of charge carriers is determined from the damping experienced by the probe.


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