The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2002
Filed:
Aug. 04, 1992
Applicant:
Inventor:
Noriyuki Shimoji, Kyoto, JP;
Assignee:
NGB Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/1336 ;
U.S. Cl.
CPC ...
H01L 2/1336 ;
Abstract
After a first insulating film is formed only on the top surface or at least on the entire surface of a polysilicon gate electrode, first impurity ions are implanted into a semiconductor substrate from above the entire substrate to provide lightly doped source and drain regions. Then, after vertical layers are formed at the sides of the gate electrode and a second insulating film is formed at least on the top surface of the gate electrode, second impurity ions are implanted from above the entire semiconductor substrate to provide heavily doped source and drain regions.