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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6486688 B1

PDFFull Text
Expired
Date of Patent:
Nov. 26, 2002

Filed:

Sep. 20, 2001

Semiconductor device testing apparatus having a contact sheet and probe for testing high frequency characteristics

Applicant:
Inventors:

Toru Taura, Tokyo, JP;

Hirobumi Inoue, Tokyo, JP;

Michinobu Tanioka, Tokyo, JP;

Takahiro Kimura, Tokyo, JP;

Kouji Matsunaga, Tokyo, JP;

Assignee:

NEC Corporation, Tokyo, JP;

Attorney:

Sughrue Mion, PLLC

Primary Examiner:

Michael Sherry

Assistant Examiner:

Roshni Kurian

Int. Cl.
CPC ...
G01R 1/073 ;
U.S. Cl.
CPC ...
G01R 1/073 ;
Abstract

A semiconductor device testing apparatus that has a laminate structure composed of a contact sheet having a first opening, an elastic sheet having a second opening and a base plate having a third opening. A supply voltage is applied to an external terminal located on a peripheral portion of the contact sheet. A probe of a probe portion is contacted to a signal electrode of a semiconductor device through the third, second and first openings.

Find Patent Forward Citations

Taura, Toru. (2002). Semiconductor device testing apparatus having a contact sheet and probe for testing high frequency characteristics (U.S. Patent No. 6486688). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6486688

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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