The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2002
Filed:
Apr. 29, 2002
Andrew J. Flewitt, Cambridge, GB;
Koninklijke Philips Electronics N.V., Eindhoven, NL;
Abstract
A method of manufacturing a bottom gate transistor comprises depositing a first microcrystalline silicon layer ( ) over the gate insulator layer ( ) and exposing the microcrystalline silicon layer to a nitrogen plasma ( ), thereby forming silicon nitride with a crystalline structure. A plurality of microcrystalline silicon nitride layers are formed in this way. A further microcrystalline silicon layer is deposited over the exposed layers defining the semiconductor body ( ) of the transistor. This method enables the bottom of the transistor body to have a microcrystalline structure, improving the mobility of the semiconductor layer, even at the interface with the gate insulator layer. The exposed silicon nitride layers become part of the gate insulator layer, and there is improved structural matching between the gate insulator layer and the semiconductor transistor body, which layers derive from the same microcrystalline silicon structure.