The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2002
Filed:
Jul. 20, 2000
Hiroshi Imamura, Suita, JP;
Kanken Techno Co., Ltd., Suita, JP;
Abstract
Apparatus for removing harmful components of a perfluorocarbon gas or a perfluorocompound. The apparatus includes a first water scrubber for washing an exhaust gas containing a perfluorocarbon or a perfluorocompound discharged from a manufacturing equipment. The apparatus further includes a gas decomposer-burner tower having a gas decomposer room connected to an upper end of the first water scrubber for mixing at least one of a hydrocarbon gas and NH gas with the exhaust gas washed by the first water scrubber and thermally decomposing a resulting mixed gas. The apparatus further includes a burner room, a heater below the heater in the gas decomposer room and the burner room, a grating below the heater in the gas decomposer room and the burner room. The apparatus further includes a pipe for supplying a reducing atmosphere forming agent to the gas decomposer room, an air-feeding pipe for supplying air to the burner room, a second water scrubber connected to a lower end of the burner room, and a water cistern on which the first and second scrubbers stand.