The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2002
Filed:
Sep. 21, 2000
Applicant:
Inventor:
Yumiko Miyano, Yokohama, JP;
Assignee:
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 1/102 ;
U.S. Cl.
CPC ...
G01B 1/102 ;
Abstract
An image acquiring section acquires a pattern image of a sample. A figure creating section creates a figure, which reflects a shape of the micropattern, on the basis of the pattern image. A density distribution data acquiring section acquires density distribution data on a straight line perpendicular to a tangential line of an outline of the figure. An edge detecting section detects pattern edge coordinates from the density distribution data. A pattern shape measuring section measures a shape of the micropattern on the basis of the pattern edge coordinates.