The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2002
Filed:
Mar. 22, 2000
Applicant:
Inventors:
Keishi Kubo, Moriguchi, JP;
Keiichi Yoshizumi, Higashiosaka, JP;
Yukio Imada, Hirakata, JP;
Hiroyuki Takeuchi, Hirakata, JP;
Koji Handa, Osaka, JP;
Assignee:
Matsushita Electric Inudstrial Co., Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 ;
U.S. Cl.
CPC ...
G01B 9/02 ;
Abstract
Optical displacement gauges are respectively arranged on both sides of a thin sheet material w, and displacement of surface position of the thin sheet material w is measured by irradiating measurement light L to the surface of the thin sheet material w. Thickness variation of the thin sheet material w is obtained from the measurement results of displacement of the surface position of the thin sheet material w.