Inductor and transformer formed with multi-layer coil turns fabricated on an integrated circuit substrate

Abstract

An inductor and transformer comprise a plurality of interleaved conductive layers and insulation layers fabricated on a monolithic semiconductor integrated circuit die. The conductive layers are shaped into coil turns of the inductor and the transformer, and are stacked vertically (perpendicular to the horizontal plane of the coil layers) and proximate to one another so as to achieve close magnetic coupling therebetween, thereby achieving a larger inductance value for a given sized coil structure. The conductive layer coil turns are connected together with conductive vias through the interposing insulation layers.