The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2002
Filed:
Jan. 18, 2000
Applicant:
Inventor:
Junko Komori, Hyogo, JP;
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/102 ;
U.S. Cl.
CPC ...
G01R 3/102 ;
Abstract
A probe card device having an insulator board and a plurality of bumps includes a probe card wafer formed of the same material as that of a wafer under test. Probe card wafer is provided with a spacer to seal between the wafer under test and probe card wafer in order to hold the wafer under test by vacuum, and a wafer through hole for evacuation. Thus, a probe card device having a probe card wafer which can be surely electrically connected with pads of a plurality of semiconductor devices formed in a semiconductor substrate under test can be provided.