The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 12, 2002

Filed:

Sep. 12, 2000
Applicant:
Inventors:

Shigeaki Okawa, Tochigi, JP;

Toshiyuki Ohkoda, Gunma, JP;

Yoshiaki Ohbayashi, Nara, JP;

Mamoru Yasuda, Osaka, JP;

Shinichi Saeki, Osaka, JP;

Shuji Osawa, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/982 ;
U.S. Cl.
CPC ...
H01L 2/982 ;
Abstract

A stationary electrode layer is formed on a semiconductor substrate and a vibrating diaphragm is disposed on spacers The vibrating diaphragm is placed so as to protrude from an end of the semiconductor substrate and terminal pads to are placed with being exposed from the vibrating diaphragm


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