The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2002
Filed:
Oct. 03, 2001
Ki-Young Lee, Suwon, KR;
Samsung Electronics Co., Ltd., Kyungki-do, KR;
Abstract
A method for fabricating a MIM capacitor of a MDL logic or analog circuit of a semiconductor device. A conductivity layer is formed on a semiconductor substrate having a first inter-level insulating layer. A capping metal layer having an etching rate higher than an oxide layer is formed on the conductivity layer. A lower electrode comprising a “conductivity layer/capping metal layer” deposition is formed by selectively etching the capping metal layer and the conductivity layer in order to expose a predetermined part of the surface of the first inter-level insulating layer. A second inter-level insulating layer is formed on the first inter-level insulating layer covering the lower electrode. A via hole is formed by selectively etching both the second inter-level insulating layer and the lower electrode thereby to expose a portion of the lower electrode so that a tapered capping metal layer remains along the lower edges of the via hole. A dielectric layer, devoid of step coverage defects and concentrated electric fields, is inserted in the via hole between the lower and upper electrodes thereby preventing current leakage and short circuits at portions of the dielectric layer. This has the beneficial effect of substantially improving product yield and reliability.