The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2002
Filed:
Nov. 01, 2000
Applicant:
Inventors:
Steven W. Fornaca, Torrance, CA (US);
Samuel Talmadge, Agoura Hills, CA (US);
Assignee:
TRW Inc., Redondo Beach, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/708 ; G03C 5/00 ; H05H 6/00 ;
U.S. Cl.
CPC ...
H01J 3/708 ; G03C 5/00 ; H05H 6/00 ;
Abstract
The invention relates to an extreme ultraviolet lithography system that utilizes thin film protective coatings to protect a plurality of hardware components, located near a laser-produced light source, from the erosive effects of energetic particles emitted by the laser-produced light source.
Fornaca, Steven. (2002). Low-sputter-yield coating for hardware near laser-produced plasma (U.S. Patent No. 6479830). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6479830
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile