The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2002
Filed:
Mar. 16, 2000
Kazuki Yokota, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
A reticle has a main pattern to be transferred to a photo-sensitive layer and surrounded by a non-transparent layer, and a discriminative pattern loops in the non-transparent layer so as to define an area to be inspected for serious defects, wherein the discriminative pattern is implemented by plural non-transparent portions such as strips arranged at intervals less than the minimum width to be transferred at the maximum resolution of the reduction projection aligner; however, the discriminative pattern or the plural non-transparent portions occupy a looped area wider than a minimum width to be recognized by a pattern recognition system so that the discriminative pattern clearly defines the area to be inspected regardless of the resolution.