The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2002
Filed:
Sep. 22, 2000
Jerome R. Lovelace, McKinney, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A yield and failure analysis system having composite wafermaps provides the ability to view numerous lots on a single screen, identifying the semiconductor manufacturing process, which caused wafer failures and the associated malfunctioning equipment. A wafer inspection instrumentation ( ) probes each wafer within a given lot and applies a series of tests. Wafer defect data is stored in a first relational database ( ) for compiling a composite wafermap for each lot. Collected wafer defect data is converted into a FFT signature. Present wafer defect data is compared with stored converted wafer defect data patterns to generate correlation coefficients. When the correlation coefficients are within a predetermined range, the converted wafer defect data pattern is stored in the second relational database ( ). Data may be accessed from both databases by a user interface ( ), enabling the user to analyze data in real time and generate reports.