The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2002
Filed:
Nov. 18, 1999
Applicant:
Inventors:
Won Ho Jhe, Seoul, KR;
Ki Hyun Kim, Seoul, KR;
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/14 ;
U.S. Cl.
CPC ...
H01J 3/14 ;
Abstract
A nano-pattern lithographic fabrication apparatus for fabricating a fine pattern using a pulled micro-pipette is disclosed. This apparatus includes a container for receiving a certain solution therein, a container controlling unit for controlling the movement of the container and an ejection of the solution filled in the container, a sample moving unit for supporting and moving the sample, a detector for detecting a distance between the container controlling unit and the sample moving unit, and a controlling unit for receiving a detection signal from the detector and controlling the movement of the container and the sample moving unit and a distance therebetween.