The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 29, 2002

Filed:

Feb. 22, 2000
Applicant:
Inventor:

Nobuaki Takeuchi, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/00 ;
U.S. Cl.
CPC ...
G02B 6/00 ;
Abstract

The apparatus for inspecting integrated circuits according to the present invention comprises: a test signal generating device that outputs an optical test signal; an optical distributor that distributes the optical test signal into a plurality of distributed optical signals by transmitting the optical test signal through a branching optical fiber network; and a plurality of pin cards each of which generates an electric test signal by performing phase adjustment of each distributed optical signal. The pin cards are arranged so as to apply the electrical test signals to pins of an integrated circuit to be inspected.


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