The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2002
Filed:
May. 23, 2001
Takeshi Shima, Shimizu, JP;
Tadao Matsunaga, Shimizu, JP;
Mitsuaki Horiike, Shimizu, JP;
Toshiyuki Yamamoto, Shimizu, JP;
Tomoegawa Paper Co., Tokyo, JP;
Abstract
The present invention provide an adhesive sheet for electrostatic chucking device having high heat resistance and to an electrostatic chucking device which causes little curvature of the ceramic board after application of heat and is excellent in heat resistance and adsorptity. The adhesive sheet of the present invention comprises a silicone resin elastic layer and thermosetting adhesive layers and which are each laminated on the silicone resin elastic layer, wherein said thermosetting adhesive layers are composed of epoxy resin or phenol resin. The electrostatic chucking device of the present invention is produced by laminating an electrode and a ceramic layer having an adsorptive surface on a metal base in this order via the adhesive sheet of the present invention.