The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2002
Filed:
Aug. 10, 2000
Marc Spinali, Danville, CA (US);
Nikon Corporation, Tokyo, JP;
Abstract
A catadioptric lens barrel structure for a projection exposure apparatus includes first and second lens barrels, each having an optical axis which runs parallel to each other. The first and second lens barrels each have an optical pivot point. The lens barrel structure includes a transverse lens barrel connecting the first and second lens barrels. A reticle is placed in front of an entrance of the first lens barrels and a wafer is placed in front of an exit of the second lens barrel. The lens barrel structure further includes a support structure for supporting the plurality of lens barrels. The support structure is made of a material having a low coefficient of thermal expansion. The support structure firmly secures the first and second lens barrels near their corresponding optical pivot points to obtain maximum optical performance. Alternatively, the support structure may firmly secure the first and second lens barrels at their base portions to provide optimum structural support.