The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2002
Filed:
Apr. 09, 2001
Applicant:
Inventors:
Assignee:
Dr. Johannes Heidenhain GmbH, Traunreut, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/14 ;
U.S. Cl.
CPC ...
H01J 3/14 ;
Abstract
An incremental position measuring system in the form of a three-grating sensor is optimized in such a way, that the degree of modulation (M) of the incremental scanning device, as well as the intensity (I) of a reference marker signal are relatively strong. To this end, a phase grating with an effective phase deviation of &lgr;/4 is embodied on a scale , as well as a reference marker (R) in the form of an amplitude structure. A compact structure is achieved by the divergent illumination of the grating located in front of the scale.