The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2002
Filed:
Mar. 20, 2001
Applicant:
Inventors:
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/120 ; H01L 2/136 ; C30B 2/300 ; C23C 1/600 ; H05H 1/02 ;
U.S. Cl.
CPC ...
H01L 2/120 ; H01L 2/136 ; C30B 2/300 ; C23C 1/600 ; H05H 1/02 ;
Abstract
A substrate M having a thin film on its surface is supported on a support . A gas discharge opening A of hydrogen radicals which faces the thin film on the substrate is provided. A semiconductor thin film is deposited on the substrate M by supplying the thin film with hydrogen radicals H from the gas discharge opening A while the substrate M is cooled via to 40 K or less through heat conduction via the support by means of refrigerator