The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2002
Filed:
Dec. 22, 1999
BAE Systems PLC, Farnborough, GB;
Abstract
A vibrating structure gyroscope having a silicon substantially planar ring vibrating structure ( ) capacitive means for imparting drive motion to and sensing motion of the vibrating structure ( ), and a screen layer ( ) surrounding the capacitive means is made by depositing photoresist material ( ) on a glass or silicon substrate ( ), hardening, patterning and developing the photoresist ( ) to expose areas of the substrate ( ), etching the exposed areas to form cavities ( ) therein, stripping any remaining photoresist material ( ) attaching a silicon layer ( ) to the cavitated substrate ( ) depositing a layer of aluminium on the silicon layer ( ), depositing photoresist material on the aluminium layer, hardening, patterning and developing the photoresist layer to expose areas of the aluminium layer, etching the exposed areas of the aluminium layer to leave regions of aluminium on the silicon layer providing bond pads ( and ), stripping the remaining photoresist from the aluminium layer, depositing another layer of photoresist material on the silicon layer ( ) over the remaining deposited aluminium layer regions, hardening, patterning and developing the layer of photoresist material to expose areas of the silicon layer ( ) and deep reactive ion etching the exposed areas of the silicon layer ( ) to form therefrom the substantially planar ring vibrating structure ( ) mounted by a hub ( ) above the cavities ( ).